Equipment Name |
Description and Notes |
Photo resist
stripper |
Mattson Aspen 2 (or
equivalent). Needs to be set up for 200mm wafers. |
Fume hood |
Suggested manufacturer: Genie Scientific (or equivalent). Model
GS-111-96. Dimensions 54.5” (H) x 96” W x 33” (D). Explosion
proof lights and electrical. |
Vacuum oven |
Suggested manufacturer: Georgia Ovens (or equivalent). Model HT.
Temperature capability 650-700 Deg C. Vacuum capability 10-4
Torr. |
Glove box (vacuum
capable) |
Chamber
size ~ 15” x 24”, with antichamber approximate dimensions 6” x
12”. 4 glove ports. |
Glove Box with
vacuum oven |
Oven
size about 6” x 6”. Suggested manufacturer: Innovative
Technology (Model 4GB 1800). |
Laboratory reverse
roll coater |
3
Roller reverse roll coater with up to 40 tons of pressure. Two
possible manufacturer: Technical Coating International and MTI
(model E200-CC). |
X-ray photoelectron
system (XPS) |
For elemental composition analysis
of thin films and particulates.
|
X-ray diffraction
system (XRD) |
For
atomic, molecular structure and morphology analysis.
|